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Thermal- and Piezo-Tunable MEMS Resonant Sensors and Actuators
koje će održati profesor Boris Sviličić, Pomorski fakultet Sveučilišta u Rijeci, u utorak, 18. veljače 2020. godine u 10.00 sati, u knjižnici Zavoda za elektroničke sustave i obradbu informacija, Fakulteta elektrotehnike i računarstva Sveučilišta u Zagrebu, Unska 3, Zagreb.
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Micro-electro-mechanical system (MEMS) resonators have been used in wide range of applications, such as oscillators, filters, gyroscopes, accelerometers and sensors. One of the main challenges for practical implementations of MEMS resonators is voltage controlled resonant frequency adjustment to overcome fabrication tolerances and reliability issues. Electrically tunable filters with a wide tunable range, on the other hand, are key components in both multiband communication systems and wide-band tracking receivers, as they possess the ability to replace filter banks. Silicon-carbide MEMS resonators that are actuated and tuned electro-thermally and piezo-electrically have been fabricated with three different resonant structures: single-clamped beam, double-clamped beam and diaphragm. Electrical characterization of the devices has been performed by measuring the two-port transmission frequency response. Details on devices’ design, materials, fabrication process and testing procedure will be presented.
Boris Sviličić is currently a full professor with the Faculty of Maritime Studies, University of Rijeka, Croatia. He received the diploma in electrical engineering (5 year curricula) from the Faculty of Electrical Engineering and Computing, University of Zagreb, Croatia, in 1999. Master of science and doctorate of science degrees in electronic engineering he received from the same institution in 2003 and 2008 respectively. From 2010 to 2011, he was working as a visiting postdoctoral research fellow at the Institute for Integrated Micro and Nano Systems, Scottish Microelectronics Centre, University of Edinburgh, U.K.
His research interests involve design, simulation, fabrication and characterization of micro-electro-mechanical systems (MEMS) and implementation of cyber-physical systems in maritime industry. He has been involved as a leader and member in several national and international research projects. He has authored over 60 scientific articles, served as the reviewer for more than 30 scientific journals, and delivered 4 keynote presentations at international conferences. He has been the main Program Editor of 4 international conferences and program committee member of more than 20 international conferences. Currently, he serves as the permanent Program Editor-in-Chief of the International Association of Maritime Universities Conference. He has been editorial board member of 2 scientific journals and currently he is Editor of IAMU Section of the WMU Journal of Maritime Affairs.